Phononic Crystal Made of Multilayered Ridges on a Substrate for Rayleigh Waves Manipulation

We present a phononic crystal to achieve efficient manipulation of surface acoustic waves (SAW). The structure is made of finite phononic micro-ridges arranged periodically in a substrate surface. Each ridge is constructed by staking silicon and tungsten layers so that it behaves as one-dimensional phononic crystal which exhibits band gaps for elastic waves. The band gap allows the existence of resonance modes where the elastic energy is either confined within units in the free end of the ridge or the ones in contact with the substrate. We show that SAW interaction with localized modes in the free surface of the ridge gives rise to sharp attenuation in the SAW transmission, while the modes confined within the ridge/substrate interface cause broad band attenuations of SAW. Furthermore, we demonstrate that the coupling between the two kinds of modes within the band gap gives high SAW transmission amplitude in the form of Fano-like peaks with high quality factor. The structure could provide an interesting solution for accurate SAW control for sensing applications, for instance.